Ultra-High Purity, High Heat Resistance and High Wear Resistance Silicon Carbide Products from Original CVD Production Method
Ferrotec’s Admap SiC products are made with unique CVD-SiC technology, which has been cultivated for over 30 years. These materials have the characteristics of ultra-high purity, high corrosion resistance, high oxidation resistance, high heat resistance, and high wear resistance. It is now indispensable for semiconductor manufacturing, which requires such characteristics at low cost.
Centered on our proprietary CVD-SiC technology, we combine the analytical and design capabilities to become involved in projects from their inception in order to provide the best possible solution.
- Large-scale parts development for a high-temperature annealing device (boat, holder, nozzle)
- Developed narrow-pitch film cassette boat
- Ultra-high purity SiC powder material
- Larger parts for next generation