Low CTE Ceramic Material

Low CTE Ceramics exhibit zero expansion at room temperature. These light weight ceramics are a good choice for applications like e-chucks and high-precision instruments where dimensional stability is critical.


  • Semiconductor process equipment parts
  • Precision machinery parts

Low CTE Ceramics Products Photo


General properties Main component purity (wt%)
Color Gray
Density (g/cm3) 2.5
Water absorption (%) 0
Mechanical properties Bending strength (MPa) 200
Young’s modulus (GPa) 140
Vickers hardness (GPa)
Thermal properties Max. operating temperature (°C)
Coefficient of thermal expansion (1/°C×10-6) RT~500°C <0.5
RT~800°C 2.0
Coefficient of thermal conductivity (W/m×K)
Thermal shock resistance ΔT (°C)
Electrical properties Volume resistivity 25°C 1014
300°C 1012
500°C 1010
800°C 106
Dielectric constant 10GHz
Dielectric loss (×10-4)
Q factor (×104)
Dielectric Breakdown voltage (KV/mm) 23

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