Low CTE Ceramic Material

Low CTE Ceramics exhibit zero expansion at room temperature. These light weight ceramics are a good choice for applications like e-chucks and high-precision instruments where dimensional stability is critical.

Applications

  • Semiconductor process equipment parts
  • Precision machinery parts

Low CTE Ceramics Products Photo

Properties

General propertiesMain component purity (wt%)
ColorGray
Density (g/cm3)2.5
Water absorption (%)0
Mechanical propertiesBending strength (MPa)200
Young’s modulus (GPa)140
Vickers hardness (GPa)
Thermal propertiesMax. operating temperature (°C)
Coefficient of thermal expansion (1/°C×10-6)RT~500°C<0.5
RT~800°C2.0
Coefficient of thermal conductivity (W/m×K)
Thermal shock resistance ΔT (°C)
Electrical propertiesVolume resistivity25°C1014
300°C1012
500°C1010
800°C106
Dielectric constant10GHz
Dielectric loss (×10-4)
Q factor (×104)
Dielectric Breakdown voltage (KV/mm)23

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