Alumina Ceramic Materials in Multiple Grades of Purity

Alumina ceramics are one of the most robust ceramics available. Alumina ceramics have outstanding properties that make them one of the most widely used ceramics for structural, wear, and corrosive environments. Additionally, with their exceptional electrical properties, high purity alumina ceramics are one of the preferred materials for semiconductor chamber applications.

Applications

  • Chamber parts in semiconductor equipment
  • Wafer transfer parts
  • FPD manufacturing equipment parts
  • Heat resistant and electrical insulation parts
Alumina Ceramics Products Photo Alumina Ceramics Products Photo

Properties

AS999AG999AM997
General propertiesCharacteristicsHigh purityPlasma-resistantGeneral grade
Main component purity (wt%)99.9999.999.7
ColorWhiteWhitish-yellowWhitish-yellow
Density (g/cm3)3.953.933.93
Water absorption (%)000
Mechanical propertiesBending strength (MPa)390390390
Young’s modulus (GPa)380380375
Vickers hardness (GPa)181718
Thermal propertiesMax. operating temperature (°C)160016001600
Coefficient of thermal expansion (1/°C×10-6)RT~500°C77.47
RT~800°C7.78.17.6
Coefficient of thermal conductivity (W/m×K)333033
Thermal shock resistance ΔT (°C)200200
Electrical propertiesVolume resistivity25°C101510151016
300°C10121013
500°C1091010
800°C107109
Dielectric constant10GHz9.99.79.7
Dielectric loss (×10-4)0.561
Q factor (×104)20.21
Dielectric breakdown voltage (KV/mm)181718

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