Silicon Nitride Ceramic Material

Silicon Nitride Ceramics offer high thermal, shock, and impact resistance. With it’s exceptional thermal and shock resistance properties, combined with it’s high strength, Silicon Nitride is a leading choice for high-temperature, high-load applications.

Applications

  • Semiconductor process equipment
  • General industrial machinery
  • Heat resistance parts

Silicon Nitride Ceramics Products Photo

Properties

General propertiesMain component purity (wt%)90
ColorGray
Density (g/cm3)3.25
Water sbsorption (%)0
Mechanical propertiesBending strength (MPa)785
Young’s modulus (GPa)285
Vickers hardness (GPa)16
Thermal propertiesMax. operating temperature (°C)1200
Coefficient of thermal expansion (1/°C×10-6)RT~500°C3.5
RT~800°C4.2
Coefficient of thermal conductivity (W/m×K)23
Thermal shock resistance ΔT (°C)650
Electrical propertiesVolume resistivity25°C1016
300°C1014
500°C1011
800°C107
Dielectric constant10GHz8.3
Dielectric loss (×10-4)25
Q factor (×104)0.04
Dielectric breakdown voltage (KV/mm)14

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