Silicon Nitride Ceramic Material
Silicon Nitride Ceramics offer high thermal, shock, and impact resistance. With it’s exceptional thermal and shock resistance properties, combined with it’s high strength, Silicon Nitride is a leading choice for high-temperature, high-load applications.
Applications
- Semiconductor process equipment
- General industrial machinery
- Heat resistance parts
Properties
| General properties | Main component purity (wt%) | 90 | |
| Color | Gray | ||
| Density (g/cm3) | 3.25 | ||
| Water sbsorption (%) | 0 | ||
| Mechanical properties | Bending strength (MPa) | 785 | |
| Young’s modulus (GPa) | 285 | ||
| Vickers hardness (GPa) | 16 | ||
| Thermal properties | Max. operating temperature (°C) | 1200 | |
| Coefficient of thermal expansion (1/°C×10-6) | RT~500°C | 3.5 | |
| RT~800°C | 4.2 | ||
| Coefficient of thermal conductivity (W/m×K) | 23 | ||
| Thermal shock resistance ΔT (°C) | 650 | ||
| Electrical properties | Volume resistivity | 25°C | 1016 |
| 300°C | 1014 | ||
| 500°C | 1011 | ||
| 800°C | 107 | ||
| Dielectric constant | 10GHz | 8.3 | |
| Dielectric loss (×10-4) | 25 | ||
| Q factor (×104) | 0.04 | ||
| Dielectric breakdown voltage (KV/mm) | 14 | ||
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