Si-SiC Metal Matrix Composite Ceramic Material

Ferrotec’s metal matrix composites feature take advantage of various material mixes to deliver unique material properties and performance characteristics. The material properties of Silicon—Silicon Carbide metal matrix composites make it a good solution for parts that are free from surface defects. Si-SiC metal matrix materials are widely used for semiconductor and LCD manufacturing and inspection equipment.

Benefits

  • Light weight
  • High stiffness
  • Low thermal expansion
  • High thermal conductivity
  • Excellent mechanical damping
  • Facture toughness
  • Near net shape process allowance

Applications

  • Semiconductor equipment parts
  • Semiconductor inspection parts
  • Display equipment parts
  • Precision equipment parts
  • Heat sinks

Metal Matrix Composite Ceramics Products Photo

Si / SiC Material Properties

Si30 / SiC70 Si50 / SiC50
Composition (vol%) Si 30
SiC 70
Si 50
SiC 50
Density (g/cm3) 3.0 2.8
Young’s modulus (Gpa) 330 280
Young’s modulus / density (Gpa ⋅ cm3/g) 110 100
Flexural strength (MPa) 300 300
Coefficient of thermal expansion (1/°C×10-6) 3 3
Thermal conductivity (W/m×K) 190 175

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