Low CTE Ceramic Material
Low CTE Ceramics exhibit zero expansion at room temperature. These light weight ceramics are a good choice for applications like e-chucks and high-precision instruments where dimensional stability is critical.
Applications
- Semiconductor process equipment parts
- Precision machinery parts
Properties
| General properties | Main component purity (wt%) | – | |
| Color | Gray | ||
| Density (g/cm3) | 2.5 | ||
| Water absorption (%) | 0 | ||
| Mechanical properties | Bending strength (MPa) | 200 | |
| Young’s modulus (GPa) | 140 | ||
| Vickers hardness (GPa) | – | ||
| Thermal properties | Max. operating temperature (°C) | – | |
| Coefficient of thermal expansion (1/°C×10-6) | RT~500°C | <0.5 | |
| RT~800°C | 2.0 | ||
| Coefficient of thermal conductivity (W/m×K) | – | ||
| Thermal shock resistance ΔT (°C) | – | ||
| Electrical properties | Volume resistivity | 25°C | 1014 |
| 300°C | 1012 | ||
| 500°C | 1010 | ||
| 800°C | 106 | ||
| Dielectric constant | 10GHz | – | |
| Dielectric loss (×10-4) | – | ||
| Q factor (×104) | – | ||
| Dielectric Breakdown voltage (KV/mm) | 23 | ||
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