Si-SiC Metal Matrix Composite Ceramic Material
Ferrotec’s metal matrix composites take advantage of various material mixes to deliver unique material properties and performance characteristics. The material properties of Silicon—Silicon Carbide metal matrix composites make it a good solution for parts that are free from surface defects. Si-SiC metal matrix materials are widely used for semiconductor and LCD manufacturing and inspection equipment.
Benefits
- Light weight
- High stiffness
- Low thermal expansion
- High thermal conductivity
- Excellent mechanical damping
- Facture toughness
- Near net shape process allowance
Applications
- Semiconductor equipment parts
- Semiconductor inspection parts
- Display equipment parts
- Precision equipment parts
- Heat sinks
Si / SiC Material Properties
| Si30 / SiC70 | Si50 / SiC50 | ||
|---|---|---|---|
| Composition (vol%) | Si 30 SiC 70 |
Si 50 SiC 50 |
|
| Density (g/cm3) | 3.0 | 2.8 | |
| Young’s modulus (Gpa) | 330 | 280 | |
| Young’s modulus / density (Gpa ⋅ cm3/g) | 110 | 100 | |
| Flexural strength (MPa) | 300 | 300 | |
| Coefficient of thermal expansion (1/°C×10-6) | 3 | 3 | |
| Thermal conductivity (W/m×K) | 190 | 175 | |
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